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URL: https://sro.txst.edu/sro-facilities/sro-nrsc.html
Proper Citation: Texas State University AJA Magnetron Sputter System (RRID:SCR_028194)
Description: Our AJA International, Inc. ATC Orion is a thin film deposition system based on physical ablation of target material by five (2RF/3DC) independently powered magnetron sputter sources. Substrates with maximum diameter of 100mm are load lock transferred to main chamber on Molybdenum substrate holder with variety of features including heating, rotation, Z motion, and RF biasing. Main chamber vacuum system consists of turbo-molecular pump, gate valve, mechanical pump, and 3 vacuum gauges. Quartz crystal monitor may be employed internally for rate calibration. Internal interlocks protect system/user from aberrant power, water, and vacuum states. Labview-based computer control allows for process development and automated sequencing. Physical vapor deposition system that deposits uniform thin films using magnetron sputtering in controlled vacuum environment.
Synonyms: , AJA International, Texas State University Magnetron Sputtering System, Inc. ATC Orion Sputter Coater
Resource Type: instrument resource
Keywords: Thin film deposition, nanofabrication, sputtering, thin films, PVD, deposition, coating
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