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URL: http://harvard.eagle-i.net/i/00000130-756e-db1e-1971-4f2080000000
Proper Citation: Harvard CNS Nanofabrication Facility (RRID:SCR_009832)
Description: Core facility that provides the following services: Nanofabrication cleanroom and instrumentation access, instrument training, staff assistance. The Center for Nanoscale Systems'' Nanofabrication Facility (CNS-NF), offers resource and staff support for fabricating and characterizing nanoscale devices and structures. The facility currently operates the 10,000 sq.ft. LISE Cleanroom with leading-edge equipment capable of electron-beam and optical lithography, physical and chemical vapor deposition, dry and wet processing, metrology, and device characterization.
Resource Type: service resource, access service resource, core facility
Keywords: fabrication
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