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Proper Citation: UC Berkeley Marvell Nanofabrication Laboratory (RRID:SCR_012246)
Description: The Marvell Nanofabrication Laboratory at the University of California, Berkeley is a multidisciplinary facility that serves research and education in the areas of integrated circuits (ICs) and systems, micro/nanofabrication technologies, micro/nanoelectromechanical (MEMS/NEMS) systems, advanced materials and interdisciplinary applications of microelectronics. This facility offers processing for both 4 inch and 6 inch substrates (wafers).
Synonyms: University of California Berkeley Marvell Nanofabrication Laboratory
Resource Type: service resource, access service resource, core facility
Keywords: integrated circuits, micro/nanofabrication technology,
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