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URL: https://www.horiba.com/en_en/products/detail/action/show/Product/gr-300-series-713/
Proper Citation: Horiba: GR-300 Series Wafer Back Side Cooling System (RRID:SCR_020075)
Description: Can control gases used to cool back side of wafers that are fixed in position by electrostatic chuck system.
Resource Type: instrument resource
Keywords: Horiba, Wafer Back Side Cooling System, Instrument, Resource Equipment, Equipment, USEDit,
Availability: Commercially available
Resource Name: Horiba: GR-300 Series Wafer Back Side Cooling System
Resource ID: SCR_020075
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Source: SciCrunch Registry (RRID:SCR_005400)
Description: Interactive portal for finding and submitting biomedical resources. Resources within SciCrunch have assigned RRIDs which are used to cite resources in scientific manuscripts. SciCrunch Registry, formerly NIF Registry, provides resources catalog. Allows to add new resources. Allows edit existing resources after registration. Curators are tasked with identifying and registering resources, examining data, writing configuration files to index and display data and keeping contents current.
URL: https://rrid.site/rin/sources/SCR_005400
