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URL: https://plasma.oxinst.com/products/pecvd/plasmapro-1000
Proper Citation: Oxford: PlasmaPro 1000 Stratum Plasma Technology (RRID:SCR_020387)
Description: Maximised large area etching and deposition production solutions available in load lock or cluster configurations with up to 3 chambers and vacuum load lock as standard with cluster capability options.
Synonyms: Oxford PlasmaPro 1000 Stratum
Resource Type: instrument resource
Keywords: Oxford, Plasma Technology, Instrument, Resource equipment, Equipment, USEDit,
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